09.04.2018
SÜSS MicroTec SE DE000A1K0235
SUSS MicroTec extends Photomask Equipment Offering with MaskTrack GlueBuster
DGAP-Media / 09.04.2018 / 14:14
SUSS MicroTec extends Photomask Equipment Offering with MaskTrack GlueBuster
Garching, April 9, 2018 - SUSS MicroTec, a leading supplier of equipment and
process solutions for the semiconductor industry and related markets,
announces today the launch of its new pellicle glue removal system, called
GlueBuster, developed specifically to support the in-fab maintenance of 193i
lithography photomasks.
By combining tightly controlled physical force with an innovative delivery
method of specifically-selected chemicals, the SUSS GlueBuster system
dramatically reduces the volume and cost of chemicals used in the pellicle
glue removal process. Additionally, by acting only on the glue residue
itself, the new process and all chemical byproducts are constrained to the
photomask's rim area, thereby perfectly maintaining the integrity of the IC
pattern itself.
"With the GlueBuster system, SUSS addresses major cost, quality and
environmental issues that have plagued the semiconductor industry for
decades," says Yuta Nagai, General Manager of SUSS MicroTec's photomask
equipment product line. "By eliminating long SPM cycles and incorporating
different chemistry with our new and innovative glue removal techniques,
photomask maintenance can now be performed at much lower operational costs
while maintaining highest pattern area integrity, which in turn greatly
extends the useful life of each photomask".
GlueBuster is available as a standalone system or clustered to the SUSS
MaskTrack X photomask cleaning platform. The new process chemicals used by
the GlueBuster system were successfully tested and selected in cooperation
with Mitsui Chemicals, Inc., a global supplier of pellicles, and a leading
US mask manufacturer.
About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for
microstructuring in the semiconductor industry and related markets. In close
cooperation with research institutes and industry partners SUSS MicroTec
contributes to the advancement of next-generation technologies such as 3D
Integration and nanoimprint lithography as well as key processes for MEMS
and LED manufacturing. With a global infrastructure for applications and
service SUSS MicroTec supports more than 8.000 installed systems worldwide.
SUSS MicroTec is headquartered in Garching near Munich, Germany. For more
information, please visit www.suss.com
Contact:
SUSS MicroTec SE
Franka Schielke
Senior Manager Investor Relations
Schleissheimer Strasse 90
85748 Garching, Deutschland
[email protected]
Tel.: +49 89 32007-161
Fax: +49 (0)89 32007-451
Email: [email protected]
End of Media Release
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Issuer: SÜSS MicroTec SE
Key word(s): Research/Technology
09.04.2018 Dissemination of a Press Release, transmitted by DGAP - a service
of EQS Group AG.
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Archive at www.dgap.de
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Language: English
Company: SÜSS MicroTec SE
Schleissheimer Strasse 90
85748 Garching
Germany
Phone: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
E-mail: [email protected]
Internet: www.suss.com
ISIN: DE000A1K0235
WKN: A1K023
Listed: Regulated Market in Frankfurt (Prime Standard); Regulated
Unofficial Market in Berlin, Dusseldorf, Hamburg, Hanover,
Munich, Stuttgart, Tradegate Exchange
End of News DGAP Media
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