30.06.2016
SÜSS MicroTec AG DE000A1K0235
SUSS MicroTec announces new Mask Aligner series MA/BA Gen4
DGAP-Media / 30.06.2016 / 10:00
SUSS MicroTec announces new Mask Aligner series MA/BA Gen4
Garching, June 30, 2016 - SUSS MicroTec, a leading supplier of equipment
and process solutions for the semiconductor industry and related markets,
announced the launch of the MA/BA Gen4 series today. The new generation of
SUSS MicroTec's semi-automated Mask and Bond Aligners extends its
capabilities by major improvements in alignment accuracy, ergonomic design
and further reduced cost of ownership. With the launch of the fourth
generation, SUSS MicroTec introduces a new platform system. The two
platform types are configured differently and consist of the MA/BA Gen4 for
standard processes and the MA/BA Gen4 Pro series for advanced high-end
processes. By moving to this new platform concept, SUSS MicroTec further
optimizes the Mask Aligner product portfolio to better align with customer
requirements.
Main application of SUSS MicroTec's MA/BA Gen4 series is full-field
lithography in Academia, MEMS, 3D Integration and the Compound
Semiconductor market. It furthermore handles processes like bond alignment,
fusion bonding and SMILE imprint. In addition to standard wafer processing
the MA/BA Gen4 series reliably processes delicate substrates, such as
fragile, warped or uneven surfaced wafers.
"Our new manual Mask Aligner series sets a high benchmark regarding cost
efficiency, user friendliness and leading edge process results" said Dr.
Per-Ove Hansson, CEO SUSS MicroTec. "With this new platform concept, we
further align with different customer requirements - the MA/BA Gen4 for
standard lithography processes or the leading edge MA/BA Gen4 Pro for
small-series production and more demanding solutions, e.g. our Soft
Conformal Imprint Lithography (SCIL) solution."
About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for
microstructuring in the semiconductor industry and related markets. In
close cooperation with research institutes and industry partners SUSS
MicroTec contributes to the advancement of next-generation technologies
such as 3D Integration and nanoimprint lithography as well as key processes
for MEMS and LED manufacturing. With a global infrastructure for
applications and service SUSS MicroTec supports more than 8.000 installed
systems worldwide. SUSS MicroTec is headquartered in Garching near Munich,
Germany. For more information, please visit www.suss.com
Contact:
SUSS MicroTec AG
Franka Schielke
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
Email: [email protected]
End of Media Release
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Issuer: SÜSS MicroTec AG
Key word(s): Research/Technology
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Language: English
Company: SÜSS MicroTec AG
Schleissheimer Strasse 90
85748 Garching
Germany
Phone: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
E-mail: [email protected]
Internet: www.suss.com
ISIN: DE000A1K0235
WKN: A1K023
Indices: TecDAX
Listed: Regulated Market in Frankfurt (Prime Standard); Regulated
Unofficial Market in Berlin, Dusseldorf, Hamburg, Munich,
Stuttgart
End of News DGAP Media
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