18.08.2015
SÜSS MicroTec AG DE000A1K0235
New Competence-Center for Nanoimprint in North America
(DGAP-Media / 18.08.2015 / 14:00)
New Competence-Center for Nanoimprint in North America
Garching, August 18, 2015 - SUSS MicroTec, a global supplier of equipment
and process solutions for the semiconductor industry and related markets,
and the Singh Center for Nanotechnology at the University of Pennsylvania
(Penn) are announcing a cooperation agreement in the field of nanoimprint
technologies. As part of this cooperation, Penn has recently received the
equipment set and the technology know-how for Substrate Conformal Imprint
Lithography (SCIL), that will expand the capabilities of the recently
installed MA/BA6 Gen3 Mask Aligner from SUSS MicroTec at Penn.
Substrate Conformal Imprint Lithography (SCIL) is a nanoimprint technique
combining the advantages of both soft and rigid stamps, allowing large-area
patterning and sub-50nm resolution to be achieved at the same time. SCIL is
applied in diverse fields, ranging from HB LEDs, Photovoltaics, MEMS, NEMS
and mass production of optical gratings for gas sensing and
telecommunications.
The Singh Center for Nanotechnology will implement SCIL for use in
plasmonic devices, semiconductor nanowires, flexible nanocrystal
electronics, biodegradable sensors and MEMS batteries. In addition,
Lithography Manager Dr. Gerald Lopez will lead the Center's efforts in
qualifying new nanoimprint materials and related process technology
development in close cooperation with SUSS MicroTec.
As a further important part of the cooperation, SUSS MicroTec's customers
will gain direct access to the cleanroom facilities and the equipment set
installed at Penn, serving as a demonstration center for North American
customers. The experience and high technology level of Penn allows the
customer to see the entire process flow, the imprinting process itself and
the subsequent steps up to a finished device.
"We are pleased to collaborate with SUSS MicroTec for developing
applications with SCIL. By combining our strengths in micro- and
nanofabrication, we are able to provide superior nanoimprint capabilities
to our researchers," stated Professor Mark Allen, Scientific Director of
the Singh Center for Nanotechnology and Alfred Fitler Moore, Professor of
Electrical and Systems Engineering. "This industrial partnership enhances
our ability to demonstrate how nanoimprint technology serves as a catalyst
in research and its translation into the commercial sector."
"We are very happy about the cooperation with the Singh Center for
Nanotechnology. Their work will contribute strongly to further
commercialize this large area nano-patterning technique in order to
accelerate the adoption for volume production. In addition, our customers
do not just benefit from the possibility to use Penn's facilities and get
insights to the entire imprinting process, but also from Penn's knowledge,
by having an experienced partner at hand", says Ralph Zoberbier, General
Manager Exposure and Laser Processing of SUSS MicroTec."
About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for
microstructuring in the semiconductor industry and related markets. In
close cooperation with research institutes and industry partners SUSS
MicroTec contributes to the advancement of next-generation technologies
such as 3D Integration and nanoimprint lithography as well as key processes
for MEMS and LED manufacturing. With a global infrastructure for
applications and service SUSS MicroTec supports more than 8.000 installed
systems worldwide. SUSS MicroTec is headquartered in Garching near Munich,
Germany. For more information, please visit www.suss.com
About the University of Pennsylvania
Penn has a proud tradition of intellectual rigor and boundary-breaking
innovation that dates back to our founder, Benjamin Franklin. That
tradition lives today through the creativity, entrepreneurship, and
engagement of our faculty, students, and staff. With research awards in
excess of $870 million, the University of Pennsylvania is home to many of
the world's leading researchers. Penn's integrated campus encompasses 12
Schools, over 165 multidisciplinary centers and institutes, and a fully
incorporated health system and consists of a large community of scholars
committed to making a difference in the world. For more information,
please visit http://www.nano.upenn.edu
Contact:
SUSS MicroTec AG
Franka Schielke
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
Email: [email protected]
End of Media Release
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Issuer: SÜSS MicroTec AG
Key word(s): Research/Technology
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Language: English
Company: SÜSS MicroTec AG
Schleissheimer Strasse 90
85748 Garching
Germany
Phone: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
E-mail: [email protected]
Internet: www.suss.com
ISIN: DE000A1K0235
WKN: A1K023
Listed: Regulated Market in Frankfurt (Prime Standard); Regulated
Unofficial Market in Berlin, Dusseldorf, Hamburg, Munich,
Stuttgart
End of News DGAP-Media
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